JPH0140082Y2 - - Google Patents

Info

Publication number
JPH0140082Y2
JPH0140082Y2 JP19240386U JP19240386U JPH0140082Y2 JP H0140082 Y2 JPH0140082 Y2 JP H0140082Y2 JP 19240386 U JP19240386 U JP 19240386U JP 19240386 U JP19240386 U JP 19240386U JP H0140082 Y2 JPH0140082 Y2 JP H0140082Y2
Authority
JP
Japan
Prior art keywords
mirror
frame
xenon lamp
socket
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19240386U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6399601U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19240386U priority Critical patent/JPH0140082Y2/ja
Publication of JPS6399601U publication Critical patent/JPS6399601U/ja
Application granted granted Critical
Publication of JPH0140082Y2 publication Critical patent/JPH0140082Y2/ja
Expired legal-status Critical Current

Links

JP19240386U 1986-12-16 1986-12-16 Expired JPH0140082Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19240386U JPH0140082Y2 (en]) 1986-12-16 1986-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19240386U JPH0140082Y2 (en]) 1986-12-16 1986-12-16

Publications (2)

Publication Number Publication Date
JPS6399601U JPS6399601U (en]) 1988-06-28
JPH0140082Y2 true JPH0140082Y2 (en]) 1989-12-01

Family

ID=31147450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19240386U Expired JPH0140082Y2 (en]) 1986-12-16 1986-12-16

Country Status (1)

Country Link
JP (1) JPH0140082Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200106833A (ko) 2019-03-05 2020-09-15 아즈빌주식회사 요금 시뮬레이션 장치 및 요금 시뮬레이션 방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5036645B2 (ja) * 2008-07-04 2012-09-26 株式会社日立ハイテクノロジーズ 露光装置及び露光装置のランプ交換方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200106833A (ko) 2019-03-05 2020-09-15 아즈빌주식회사 요금 시뮬레이션 장치 및 요금 시뮬레이션 방법

Also Published As

Publication number Publication date
JPS6399601U (en]) 1988-06-28

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